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at least one actuating electrode, which cooperates with the vibrating mechanical elemen. vibrating electromechanical component of claim 16, wherein the electromechanical elem.
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a thermionic electron source and/or a movable mechanical structure are employed. The . electromechanical device having a mechanical structure, the method comprising: depos.
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Publication » Acoustic electromechanical energy loss mechanism for suspended micro. ABSTRACT: A micromechanical, laterally vibrating disk resonator, fabricated via a tech.
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